Ultra Clean Processing of Semiconductor Surfaces XI
Mertens, Paul, Meuris, Marc, Heyns, MarcThis extensively revised comprehensive textbook, covering a wide range of topics in systems engineering, is suitable for courses at the graduate and undergraduate levels, each with a different emphasis. There is more than enough material to cover two semesters of an undergraduate course, as well as a one semester graduate course. The pedagogy provides enough flexibility for an instructor to teach the topics in systems engineering she or he would like. This book is sufficiently broad-based for undergraduate and graduate programs in various branches of engineering and management.
Κατηγορίες:
Έτος:
2013
Εκδότης:
Trans Tech Publications Ltd
Γλώσσα:
english
Σελίδες:
328
ISBN 10:
3037855274
ISBN 13:
9783037855270
Αρχείο:
PDF, 46.12 MB
IPFS:
,
english, 2013