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Handbook of Silicon Based MEMS Materials and Technologies

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Handbook of Silicon Based MEMS...

Handbook of Silicon Based MEMS Materials and Technologies

Markku Tilli & Mervi Paulasto-Krockel

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https://doi.org/10.1016/C2018-0-01845-9

Κατηγορίες:

Έτος:

2020

Έκδοση:

3

Εκδότης:

Elsevier

Γλώσσα:

english

Σελίδες:

996

ISBN 10:

0128177861

ISBN 13:

9780128177860

Αρχείο:

PDF, 124.76 MB

IPFS:

,

english, 2020

Αυτό το βιβλίο δεν είναι διαθέσιμο για λήψη λόγω καταγγελίας του κατόχου των πνευματικών δικαιωμάτων

Beware of he who would deny you access to information, for in his heart he dreams himself your master

— Pravin Lal

Ίσως σας ενδιαφέρει

Tai-Ran Hsu — MEMS and Microsystems Design and Manufacture

Cornelius T. Leondes — Mems/Nems: (1) Handbook Techniques and Applications Design Methods, (2) Fabrication Techniques, (3) Manufacturing Methods, (4) Sensors and Actuators, (5) Medical Applications and MOEMS (v. 1)

Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim — Microsensors, MEMS, and smart devices

Veikko Lindroos — Handbook of Silicon Based MEMS Materials and Technologies.

Danny Banks — Microengineering, MEMS, and Interfacing: A Practical Guide

Mohamed Gad-el-Hak — The MEMS Handbook

Sergey Edward Lyshevski — MEMS and NEMS: Systems, Devices, and Structures

Mohamed Gad-el-Hak — The MEMS Handbook MEMS Design

Castañer, Luis — Understanding MEMS : principles and applications

Doruk Senkal, Andrei M. Shkel — Whole-Angle MEMS Gyroscopes: Challenges and Opportunities (IEEE Press Series on Sensors)

Guangya Zhou, Chengkuo Lee — Optical MEMS, Nanophotonics, and Their Applications

Vikas Choudhary — MEMS: fundamental technology and applications

Roy, Sunipa; Sarkar, Chandan Kumar — MEMS and nanotechnology for gas sensors

Steve P. Beeby, Graham Ensel, Michael Kraft — MEMS Mechanical Sensors

Elena Gaura, Robert Newman — Smart MEMS and sensor systems

Rajendra M. Patrikar — MEMS Resonator Filters

Haoran Wen — Toward Inertial-Navigation-on-Chip: The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes

Alissa M. Fitzgerald, Carolyn D. White, Charles C. Chung — MEMS Product Development: From Concept to Commercialization

Mahmoud Rasras, Ibrahim (Abe) M. Elfadel, Ha Duong Ngo — MEMS Accelerometers

Jaume Verd, Jaume Segura — Development of CMOS-MEMS/NEMS Devices

Harmeet Bhugra, Gianluca Piazza (eds.) — Piezoelectric MEMS Resonators

Masayoshi Esashi — 3D and Circuit Integration of MEMS

Reza Ghodssi, Pinyen Lin — MEMS Materials and Processes Handbook

Muthu B.J. Wijesundara, Robert Azevedo — Silicon Carbide Microsystems for Harsh Environments

Wolfgang Menz, Jürgen Mohr, Oliver Paul — Microsystem Technology

2014 — MEMS cost analysis from laboratory to industry

John M. Andrews and George K. Celler (Editors) — ULSI Science and Technology 1991

C. Y. Chang, S. M. Sze — Ulsi Technology

Stephen A. Campbell — The Science and Engineering of Microelectronic Fabrication

Stephen A. Campbell — Fabrication Engineering at the Micro- and Nanoscale

Tina L. Lamers, Beth L. Pruitt (auth.), Reza Ghodssi, Pinyen Lin (eds.) — MEMS Materials and Processes Handbook

T. Fukuda, Wolfgang Menz — Micro Mechanical Systems: Principles and Technology

Sami Franssila — Introduction to Microfabrication

Sami Franssila(auth.) — Introduction to Microfabrication, Second Edition

Sami Franssila — Introduction to Microfabrication

W. Trimmer, Institute of Electrical and Electronics Engineers — Micromechanics and MEMS: classic and seminal papers to 1990

Madou, Marc J — Fundamentals of microfabrication: the science of miniturization

Subramanian S. Iyer, Subramanian S. Iyer, Andre J. Auberton-Herve — Conference on Earth Station Technology, 14-16 October 1970

Kumar Shubham, Ankaj Gupta — Integrated Circuit Fabrication

Jumana Boussey — Microsystems Technology: Fabrication, Test & Reliability

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